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A Hermetic Advanced Packaging Solution for Optical Devices Using a Glass-Capping Technology on Wafer-Level

: Maus, S.; Hansen, U.; Leib, J.; Töpper, M.

Volltext ()

Procedia chemistry. Online journal 1 (2009), Nr.1, S.1527-1530
ISSN: 1876-6196
Eurosensors <23, 2009, Lausanne>
Konferenzbeitrag, Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IZM ()

The wafer-level packaging (WLP) process invented allows hermetic capping of optical devices on wafer-level yielding miniaturized glass cavity windows on top of the optical area, at the same time leaving the contact area accessible for standard electrical connections i.e. wire bond. These smaller chip-size optical cavity packages are used within standard chip-on-board (COB) assemblies for high performance optical applications providing high yields and utmost reliability.