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Hermetic BSG thin film coatings for harsh environment applications

: Maus, S.; Hansen, U.; Leib, J.; Toepper, M.

Courtois, B. ; IEEE Components, Packaging, and Manufacturing Technology Society; Circuits Multi-Projets -CMP-, Grenoble:
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 : Seville, Spain, 5-7 May 2010; including the Conference on CAD, Design and Test and the Conference on Microfabrication, Integration and Packaging
Piscataway/NJ: IEEE, 2010
ISBN: 978-1-4244-6636-8
ISBN: 978-2-35500-011-9
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) <2010, Seville>
Fraunhofer IZM ()

The use of a plasma-assisted e-beam evaporation process enables a cost-efficient exploitation of the outstanding material properties of borosilicate glass - a chemically very inert material with minimal moisture absorption, excellent optical properties and excellent time and temperature stability. This paper gives further insight on the deposition and structuring of borosilicate glass films and the achievable film properties as well as feasible applications.