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Development of charged particle detectors by integrating gas amplification stages and CMOS ASICs on wafer level

: Kaminski, J.; Baumgartner, T.; Desch, K.; Ehrmann, O.; Fritzsch, T.; Krautscheid, T.; Mayer, S.; Töpper, M.


Institute of Electrical and Electronics Engineers -IEEE-; VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-:
3rd Electronics System Integration Technology Conference, ESTC 2010. Proceedings. Vol.2 : Berlin, Germany, 13 - 16 September 2010
New York, NY: IEEE, 2010
ISBN: 978-1-4244-8553-6
ISBN: 978-1-4244-8554-3
Electronics System Integration Technology Conference (ESTC) <3, 2010, Berlin>
Fraunhofer IZM ()

Gaseous detectors with a highly pixelized readout have demonstrated good capabilities of tracking high energetic particles. In particular, using post-processing methods to integrate the gas amplification stage on top of pixel readout chips has proven to detect single electrons with a very high efficiency and accuracy. So far, these detectors called InGrids or GEMGrids have been produced in a chip based process at the University of Twente. A new wafer based production process has been set up. A first test sample has been produced and tested. Signals from a as well as from a source could be observed.