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DoE simulations and measurements with the microDAC stress chip for material and package investigations

: Schindler-Saefkow, F.; Otto, A.; Rzepka, S.; Wittler, O.; Wunderle, B.; Michel, B.


Institute of Electrical and Electronics Engineers -IEEE-; VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-:
3rd Electronics System Integration Technology Conference, ESTC 2010. Proceedings. Vol.2 : Berlin, Germany, 13 - 16 September 2010
New York, NY: IEEE, 2010
ISBN: 978-1-4244-8553-6
ISBN: 978-1-4244-8554-3
Electronics System Integration Technology Conference (ESTC) <3, 2010, Berlin>
Fraunhofer IZM ()

One major challenge for power and microelectronics system integration today is the assurance of reliability, very often mastered by a carefully tuned interplay of the still dissimilar materials that make up a package, first under optimized processing conditions, and then often under combined loading conditions. Therefore, not only during design but also during test and operation it would be desirable to in-situ monitor the stresses induced within a package onto a silicon die, as these thermo-mechanically induced stresses give rise to failure modes like solder fatigue, interface delamination and die cracking. In this vein the knowledge of the stress state would not only give much valued feedback to verify the simulations which are often used to predict lifetime based on material characterization. But it would also enable designers to study the behavior over time, revealing degradation mechanisms in the sense of a non-destructive failure analysis technique, so it could co ntribute to a better understanding of failure up to the point where the stress sensor could even be used as a lifetime monitor (health monitoring for electronic packages). The in-situ detection of failures in microelectronic packages in an experiment is still a big challenge. The reliability of most packages will be qualified by measuring the electrical resistance of daisy chain structures. The moment of failure in the electrical signals or the changes in the resistance are used for reliability or lifetime estimations. But the correlation of electrical resistance in the metallization and the packages or system reliability is very low. Extremely time-consuming investigation is needed to localize package failure after the experiment. Therefore, a chip, the MicroDAC stress chip, has been developed in a publicly funded project that is able to measure stress induced by thermo-mechanical loads. Different components of the stress tensor can be read out, as e.g. the in-plane stress difference and the in-pla