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Conformal transparent conducting oxides on black silicon

: Otto, M.; Kroll, M.; Käsebier, T.; Lee, S.-M.; Putkonen, M.; Salzer, R.; Miclea, P.T.; Wehrspohn, R.B.


Advanced Materials 22 (2010), Nr.44, S.5035-5038
ISSN: 0935-9648
ISSN: 1521-4095
Fraunhofer IWM ()

Black silicon with aspect ratios up to 10 and an average optical reflectance of only 2.5% over the whole absorbing spectral range was covered perfectly conformal with a transparent conductive oxide. The thin film was deposited by thermal ALD and exhibited a resistivity of 1.1 Ohm cm. This concept promises a new design for an efficient heterojunction silicon solar cell.