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Application of electron tomography for semiconductor device analysis
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2006
Journal Article
Titel
Application of electron tomography for semiconductor device analysis
Author(s)
Kübel, C.
Lee, T.-C.
Su, D.
Luo, J.-S.
Lo, H.-M.
Russell, J.
Zeitschrift
Microscopy and microanalysis
DOI
10.1017/S1431927606065068
Language
English
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Fraunhofer-Institut für Fertigungstechnik und Angewandte Materialforschung IFAM