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A MEMS based visible-NIR Fourier transform microspectrometer

: Ataman, C.; Urey, H.; Isikman, S.O.; Wolter, A.


Ürey, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MEMS, MOEMS, and Micromachining II : Strasbourg, France, 3 April 2006
Bellingham/Wash.: SPIE, 2006 (SPIE Proceedings Series 6186)
ISBN: 0-8194-6242-X
Art. 61860C
Conference "MEMS, MOEMS, and Micromachining" <2006, Strasbourg>
Fraunhofer IPMS ()

Design, fabrication and characterization of a novel out-of-plane vertical comb-drive actuator based Fourier transform microspectrometer (FTS) is presented. The spectrometer utilizes resonant mode vertical comb actuators as a variable-depth diffraction grating and a single photodetector to monitor the 0th order of the diffraction pattern. The spectrum of the source illuminating the gratings is computed by Fourier transforming the 0th order intensity as a function of the optical path difference. The vertical comb actuators have a travel range of 100 m under atmospheric pressure with 28V excitation, which yields a theoretical spectral resolution of 0.5nm in the visible and better than 5nm in the telecom wavelengths.