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Ultra flat high resolution microscanners

 
: Hsu, S.-T.; Klose, T.; Drabe, C.; Wolter, A.; Schenk, H.

:

IEEE Lasers and Electro-Optics Society:
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS : Hualien, Taiwan, 12 - 16 August 2007
Piscataway, NJ: IEEE Service Center, 2007
ISBN: 1-424-40641-2
ISBN: 978-1-424-40641-8
S.197-198
Optical MEMS and nanophotonics <12, 2007, Hualien>
Englisch
Konferenzbeitrag
Fraunhofer IPMS ()

Abstract
We present a high frequency micro-scanner with 27 nm dynamic deformation at -13° mechanical scan angle. To achieve that, a dry-wet combination process is utilized to fabricate reinforcement frames for scanner flatness improvement.

: http://publica.fraunhofer.de/dokumente/N-171742.html