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Lamellar grating based mems fourier transform spectrometer

: Seren, H.R.; Ayerden, N.P.; Sharma, J.; Holmström, S.T.S.; Sandner, T.; Grasshoff, T.; Schenk, H.; Urey, H.


IEEE Photonics Society:
International Conference on Optical MEMS and Nanophotonics, OPT MEMS 2010 : 9-12 Aug. 2010
Piscataway: IEEE, 2010
ISBN: 978-1-4244-8925-1
ISBN: 978-1-4244-8926-8
International Conference on Optical MEMS and Nanophotonics <2010, Sapporo>
Fraunhofer IPMS ()

A Lamellar grating interferometer based Fourier Transform Infrared Spectrometer (FTIR) with out-of-plane resonant mode is implemented and characterized. Device has 10mm2 clear aperture. Dynamic diffraction grating is comb-actuated and a maximum p-p deflection of 355 m is obtained at 76 V. The excitation frequency is 971 Hz and deflection frequency of 485.5Hz.