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Low-loss gratings for next-generation gravitational wave detectors

: Clausnitzer, T.; Kley, E.-B.; Tünnermann, A.; Bunkowski, A.; Burmeister, O.; Danzmann, K.; Schnabel, R.; Duparre, A.; Gliech, S.


Fulton, M.L. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advances in thin-film coatings for optical applications II : 1 - 2 August 2005, San Diego, California, USA
Bellingham, WA: SPIE, 2005 (Proceedings of SPIE 5870)
ISBN: 978-0-8194-5875-9
ISBN: 0-8194-5875-9
Paper 58700J
Conference "Advances in Thin-Film Coatings for Optical Applications" <2, 2005, San Diego/Calif.>
Fraunhofer IOF ()

By combining electron beam lithography with coating processes, very shallow gratings with diffraction efficiencies between 0.02% and 7% have been realized. Advantages and disadvantages of different layout concepts for such gratings, their fabrication regime and measurements of their scattering will be discussed. The application of such gratings as coupling components to a reflective Fabry-Perot cavity resulted in a finesse of more than 400.