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A highly sensitive catalytic gas sensor for hydrogen detection based on sputtered nanoporous platinum

: Sturm, H.; Brauns, E.; Seemann, T.; Zoellmer, V.; Lang, W.


Jakoby, B.; Vellekoop, M.J.:
Eurosensors XXIV Conference 2010 : September 5-8, 2010, Linz, Austria
Amsterdam: Elsevier, 2010 (Procedia engineering 5.2010)
ISSN: 1877-7058
Eurosensors <24, 2010, Linz>
Fraunhofer IFAM ()

This paper presents a new thermal gas sensor for hydrogen detection based on a catalytic thin film made of sputtered nanoporous platinum. Due to an increased porosity of sputtered catalytic layers, sensitivity could remarkably be raised from commonly 6 V/ppm [1] up to 18 V/ppm. As sensing element a thermopile made of p-doped polysilicon and an alloy of tungsten titanium is used. A second thermopile is placed for reference measurement and reduced cross sensitivity on same membrane.