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Plasma density development in a pulsed microwave concentrator

: Hunyar, C.; Räuchle, E.; Kaiser, M.; Graf, M.; Alberts, L.; Unger, R.


Cavaleiro, A.:
Plasma surface engineering, PSE 2006 : Proceedings of the Tenth International Conference on Plasma Surface Engineering; Garmisch-Partenkirchen, Germany, September 10-15, 2006
Weinheim: Wiley-VCH, 2007 (Plasma processes and polymers 4.2007, Nr.S1)
ISBN: 978-3-527-32016-5
International Conference on Plasma Surface Engineering (PSE) <10, 2006, Garmisch-Partenkirchen>
Konferenzbeitrag, Zeitschriftenaufsatz
Fraunhofer ICT ()

In this work bifocal elliptic structures are analyzed which can sufficiently concentrate microwaves in a focal point or line for the ignition of plasma. With these structure, microwave discharges can be generated geometrically removed from the antennas. A parametric model for the calculation of microwave discharge plasma in a low pressure environment is presented. It is used to find self-consistent solutions for the electron density and the electromagnetic field by using the COMSOL Multiphysics finite-element method software package. This model was applied to investigate the plasma density and electric field distribution in bifocal elliptic microwave concentrators under continuous and pulsed operation.