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Untersuchungen zur Abscheidung von Parylen C als Kapselungsmaterial für Biomedizinische Mikroimplantate

Coating material of parlene C as encapsulation material for biomedical micro-implants
: Kammer, S.; Wien, S.; Koch, K.P.; Robitzki, A.; Stieglitz, T.

Biomedizinische Technik 47 (2002), Suppl.1, Pt.2, S.823-826
ISSN: 0013-5585
ISSN: 1862-278X
Fraunhofer IBMT ()

Biomedical microsystems attain to contact with environments like blood, ephitHelium and saline solutions therefore they need an encapsulation. Parylene seems to be a suitable polymer to cover the implants and protect them against moisture and aggressive environment. This paper describes the characterisation of Parylene C coatings and its possibilities to protect implants. Beside the encapsulation of biomedical microsystems the manufacturing of fexible electrodes and the cytotoxicity behavior of RIE etched Parylene layers was investigated.