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Novel single-source precursors for the fabrication of PbTiO3, PbZrO3 and Pb(Zr1-xTix)O3 thin-films by chemical vapor deposition

: Veith, M.; Bender, M.; Lehnert, T.; Zimmer, M.; Jakob, A.


Dalton transactions 40 (2011), Nr.5, S.1175-1182
ISSN: 1477-9226
ISSN: 2209-2386
ISSN: 1477-9234
Fraunhofer IBMT ()

Lead titanate, lead zirconate, and lead zirconate titanate (PZT) films in the sub-m-range were produced at temperatures around 400 °C using novel single-source precursors in a classical thermal CVD process. The design of two bimetallic alkoxide compounds, a lead titanate and a lead zirconate source with almost identical physical properties and complement miscibility, resulted in a new quasi-single-source PZT precursor, an azeotropic mixture that evaporates at 30 °C and at a pressure of 4 × 10-1 mbar. After thermal treatment at 650 °C, transparent (100)-oriented PZT films with remnant polarization of 20 C cm-2 and a coercive field strength of 20 V m-1 were achieved. An additional lead source is not required.