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2010
Journal Article
Titel
Compositional variation of nearly lattice-matched InAlGaN alloys for high electron mobility transistors
Abstract
Quaternary InAlGaN semiconductors with AlN mole fractions between 40% and 81% and respective InN contents of 7% and 19% including InAlN as a ternary border case have been grown by plasma-assisted molecular beam epitaxy. The electron mobility in InAlGaN-based heterostructures increases with Ga concentration in the barrier up to 1460 cm2 /V s at a sheet electron density of 1.9× 10(exp 13) cm-2. An advanced spacer comprising an AlN/GaN/AlN triple-layer sequence is inserted between the GaN-buffer and the InAlGaN-barrier. Transistors with thin quaternary barrier show a large current density of 2.3 A/mm and an excellent transconductance of 675 mS/mm.
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