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2009
Conference Paper
Titel
Identification of process models and controller design for vacuum coating processes with a long dead time using an identification tool with advisory support
Abstract
Model identification and controller design for processes with long dead times requires the availability of tools which support static, dynamic and time series analysis as well as data preparation methods (e.g. dead time correction, filtering algorithms, etc.). ADM, a tool for process identification yields this functionality introducing a new philosophy of usability. In this article this philosophy is described using the example of identifying a process model for an electron beam physical vapor deposition (EB-PVD) coating process of metall stripes with a long dead time. Furthermore a controller design for this process is presented.