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Investigation of boron delta-layers in silicon measured by atom probe tomography (APT)

 
: Klein, C.; Mutas, S.; Würfel, A.; Zschech, E.

:

Brewer, L.N. ; Microscopy Society of America; Microbeam Analysis Society; International Metallographic Society -IMS-:
Microscopy and microanalysis 2009. Proceedings : Microscopy Society of America 67th annual meeting, Microbeam Analysis Society 43rd annual meeting, International Metallographic Society 42nd annual meeting, Richmond, Virginia, July 26 - July 30, 2009
Cambridge: Cambridge University Press, 2009 (Microscopy and analysis 15.2009, Supplement 2)
S.282-283
Microscopy Society of America (Annual Meeting) <67, 2009, Richmond/Va.>
Microbeam Analysis Society (Annual Meeting) <43, 2009, Richmond/Va.>
International Metallographic Society (Annual Meeting) <42, 2009, Richmond/Va.>
Englisch
Konferenzbeitrag, Zeitschriftenaufsatz
Fraunhofer CNT ()

: http://publica.fraunhofer.de/dokumente/N-169026.html