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Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region

: Thielsch, R.; Gatto, A.; Kaiser, N.


Applied optics 41 (2002), Nr.16, S.3211-3217
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Fraunhofer IOF ()
mechanical stress; thermal-elastic property; oxide coating; deep- ultraviolet spectral region; single oxide layer; high-reflection multilayer coating; reactive evaporation deposition; Plasma-Ion Assisted Deposition; ion beam sputtering; microstructure; infrared spectroscopy; stress-temperature curve; substrate material; fused silica; silicon; biaxial moduli; thermal expansion coefficient

Mechanical stress and the structures of SiO/sub 2/, Al/sub 2/O/sub 3/, and HfO/sub 2/ single oxide layers and of high-reflection multilayer coatings deposited by reactive evaporation, plasma ion-assisted deposition, and ion-beam sputtering have been studied. The stress was related to the microstructure and to the incorporation of water by means of infrared spectroscopy. From the slopes of measured stress-temperature curves of these coatings deposited onto two substrate materials (silicon and fused silica), the biaxial moduli and the thermal expansion coefficients of the films were estimated.