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2009
Conference Paper
Titel
CMOS compatible silicon etched V-grooves integrated with a SOI fiber coupling technique for enhancing fiber-to-chip alignment
Abstract
Integration of a polarization insensitive inverted taper-based fiber coupling structure with silicon etched V-grooves is demonstrated in CMOS silicon photonics. Coupling loss of 7.5 dB are measured at lambda=1.55 mum. A spectrum broader than 70 nm is observed.