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Investigation of long throw PVD of titanium films from polycrystalline targets with texture

: Wolf, H.; Streiter, R.; Tirschler, W.; Giegengack, H.; Urbansky, N.; Gessner, T.


Microelectronic engineering 63 (2002), Nr.4, S.329-345
ISSN: 0167-9317
Fraunhofer IZM ()
long throw PVD; titanium film; polycrystalline target; texture; target property; long throw sputtering; Monte Carlo simulation; deposition rate; radial dependence; film thickness; target texture; electron backscatter diffraction; x ray diffraction; Ti

The influence of target properties on the deposition of titanium films by long throw sputtering has been studied using Monte Carlo simulation. The precise knowledge and consideration of existing textures is shown to be a necessary prerequisite for the correct prediction of deposition rates and the radial dependence of film thickness as well. The experimental investigation of target textures has been carried out both by electron backscatter diffraction and X-ray diffraction. The results are compared and discussed.