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Investigation of etch processes of dense and porous low-k dielectrics using OES and QMS as in situ diagnostic methods

 
: Zimmermann, S.; Blaschta, F.; Schaller, M.; Rülke, H.; Schulz, S.E.; Gessner, T.

Naik, M. ; Materials Research Society -MRS-; Univ. of California, Continuing Education in Engineering:
Advanced Metallization Conference, AMC 2008 : Proceedings of the conference held September 23 - 25, 2008, San Diego, California, USA and October 8 - 10, 2008, at the University of Tokyo, Tokyo, Japan
Warrendale, Pa.: MRS, 2008
ISBN: 978-1-605-11125-4
S.387-392
Advanced Metallization Conference (AMC) <25, 2008, San Diego/Calif.>
Advanced Metallization Conference Asian Session (ADMETA) <18, 2008, Tokyo>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()

: http://publica.fraunhofer.de/dokumente/N-167513.html