Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Investigation of etch processes of dense and porous low-k dielectrics using OES and QMS as in situ diagnostic methods
| Naik, M. ; Materials Research Society -MRS-; Univ. of California, Continuing Education in Engineering:
Advanced Metallization Conference, AMC 2008 : Proceedings of the conference held September 23 - 25, 2008, San Diego, California, USA and October 8 - 10, 2008, at the University of Tokyo, Tokyo, Japan
Warrendale, Pa.: MRS, 2008
ISBN: 978-1-605-11125-4
S.387-392 |
| Advanced Metallization Conference (AMC) <25, 2008, San Diego/Calif.>
Advanced Metallization Conference Asian Session (ADMETA) <18, 2008, Tokyo> |
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| Englisch |
| Konferenzbeitrag |
| Fraunhofer ENAS () |