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Investigation of etch processes of dense and porous low-k dielectrics using OES and QMS as in situ diagnostic methods
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2008
Conference Paper
Titel
Investigation of etch processes of dense and porous low-k dielectrics using OES and QMS as in situ diagnostic methods
Author(s)
Zimmermann, Sven
Blaschta, F.
Schaller, M.
Rülke, H.
Schulz, Stefan E.
Geßner, Thomas
Hauptwerk
Advanced Metallization Conference, AMC 2008
Konferenz
Advanced Metallization Conference (AMC) 2008
Advanced Metallization Conference Asian Session (ADMETA) 2008
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS