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Development of a microspectrometer for the infrared range

: Otto, T.; Saupe, R.; Bruch, R.; Gessner, T.


Temkin, R.J.:
Twenty Seventh International Conference on Infrared and Millimeter Waves 2002. Conference digest : September 22 - 26, 2002, San Diego, CA, USA
Piscataway: IEEE Operations Center, 2002
ISBN: 0-7803-7423-1
International Conference on Infrared and Millimeter Waves (IRMMW) <27, 2002, San Diego/Calif.>
Fraunhofer IZM ()
microspectrometer system; mid infrared range; micromechanical component; compact device; mid-IR range; 2.5 to 6 micron

In this paper we demonstrate the development of a new microspectrometer system for the mid-infrared range (2.5 - 6 mu m). Micromechanical components are used for the system, therefore a very compact and economical spectroscopic device has been realized. First measurement results are reported as well as the functional ability of the device.