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2002
Conference Paper
Titel
Inorganic-organic hybrid materials (ORMOCER®s) for multilayer technology - passivation and dielectric behavior
Abstract
Inorganic-organic hybrid polymers (ORMOCER(R)s) have been synthesized by sol-gel processing. The materials can be functionalized such that their physical and chemical properties can be reproducibly tailored towards the desired application, i.e., electronics, optics (passives/actives) or passivation technology. Besides, the materials which show negative resist behavior, can be patterned by UV exposure with good resolution. The materials are well-suited for thin and thick film technology using conventional coating technology, applied in multi-layer technology. We here particularly focus on materials for passivation against environmental influences, which additionally exhibit very good dielectric properties.
Author(s)
Language
English
Tags
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inorganic organic hybrid material
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multilayer technology passivation
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dielectric behavior
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sol-gel processing
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physical properties
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chemical property
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electronic
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optic
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negative resist behavior
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UV exposure
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resolution
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thick film
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coating technology
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dielectric property
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adhesion
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permittivity
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dielectric strength
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Young's modulus
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reflow soldering stability
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degradation
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water uptake
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water vapor permeation