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Macroparticle filtering of high-current vacuum arc plasmas

: Schülke, T.; Anders, A.; Siemroth, P.

Anders, S. ; Lawrence Livermore National Laboratory; American Physical Society -APS-:
XVII.International Symposium on Discharges and Electrical Insulation in Vacuum 1996. Proceedings
Piscataway, NJ: IEEE, 1996
ISBN: 0-7803-2906-6
ISBN: 0-7803-2907-4
ISBN: 0-7803-2908-2
International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) <17, 1996, Berkeley/Calif.>
Fraunhofer IWS ()
Bogentechnologie; PVD

The transport of vacuum arc plasmas through a 90o curved magnetic macroparticle filter was investigated using a high-current pulsed arc source with a carbon cathode. The peak arc current was in the range of a few kA, exceeding considerably the level of what has been reported in literature. The main question investigated was wether magnetic macroparticle filters could be scaled-up and simultaneously maintaining the transport efficiency of small filters. In front of the cathode we found arc-current-depending total ion saturation currents in the range from 10 to 23% of the arc current. The best transport efficiency was 25% (time integrated output / time intgrated input) at a duct wall bias of 25.5 V and at an axial magnetic field of about 100 mT. This is comparable to what has been observed with other, low-current filters.