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Transparent conductive oxide photonic crystals on textured substrates

: Upping, J.; Salzer, R.; Otto, M.; Beckers, T.; Steidl, L.; Zentel, R.; Carius, R.; Wehrspohn, R.B.

Postprint urn:nbn:de:0011-n-1633663 (202 KByte PDF)
MD5 Fingerprint: 53cb738f9eb45b74c024476be83a3bdb
Erstellt am: 20.4.2013

Photonics and nanostructures 9 (2011), Nr.1, S.31-34
ISSN: 1569-4410
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IWM ()

Three-dimensional ZnO:Al photonic crystals were fabricated by atomic layer deposition on highly textured substrates. It turns out that these inverted opals consist of a thin intermediate disordered layer close to the textured substrate followed by a highly-ordered photonic crystal layer. The photonic crystals themselves exhibit comparable optical properties to those on planar substrates.