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MEMS-based laser scanning microscope for endoscopic use

: Schelinski, U.; Kobbe, J.; Dallmann, H.-G.; Grüger, H.; Förster, M.; Scholles, M.; Schwarzenberg, M.; Rieske, R.


Schenk, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and Miniaturized Systems X : SPIE Photonics West, 22.-27.1.2011, San Francisco, California, USA
Bellingham, WA: SPIE, 2011 (Proceedings of SPIE 7930)
ISBN: 978-0-8194-8467-3
Paper 793004
Conference "MOEMS and Miniaturized Systems" <10, 2011, San Francisco/Calif.>
Fraunhofer IPMS ()

A miniaturized MEMS scanning microscope is presented, which enables endoscopic imaging for medical, biological and technical purposes. It consists of an optical head of only 8 mm diameter that is coupled via optical fibers and wires to a distant unit containing optics and electronics for microscope control and data processing. A PC or notebook is completing the system, acting as user interface, image display and storage. The microscope uses a focused flying laser spot allowing a resolution of about 15 um within the focus plane. This enables new endoscopic applications as in-vivo investigation of cancer-suspicious tissues in medicine.