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Miniaturized systems to be employed in production appliances

: Schlenker, D.; Miehlich, R.; Irion, K.-M.; Weissener, T.

MST News (2003), Nr.2, S.11-13
ISSN: 0948-3128
Fraunhofer IPA ()
Prozessüberwachung; Visualisierungssystem; Mikrotechnik; Miniaturisierung; Fertigung

With the general trend towards the miniaturization of production appliances, the demand for integratable compact design systems is increasing. A possible approach to realizing such systems results from the application of microtechnology. This article describes two miniaturized visualization systems for process monitoring in production appliances developed within the framework of the project "Mikrostell" sponsored by the BMBF (Federal Ministry of Education and Research). Furthermore, a micro annular gear pump, which was developed for the delivery of small amounts within the scope of the project, will be introduced.