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2010
Conference Paper
Titel
Double sided inline diffusion of multicrystalline silicon wafers
Abstract
A new double sided inline diffusion is compared to single sided inline diffusion. We use a Centrotherm inline furnace with its walking string wafer transport system together with a patented liquid phosphorus dopant. Compared to POCl3 emitter diffusion, single sided inline diffusion led often to lower efficiencies. We observed that this efficiency can be raised by a double sided inline diffusion. High resolution light beam induced current (LBIC) topograms show which parts of the solar cell are improved by the double sided diffusion. The effect is investigated for different diffusion temperatures and times.