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Quality control of ultra-microelectrode arrays using cyclic voltammetry, electrochemical impedance spectroscopy and scanning electrochemical microscopy

 
: Köster, O.; Schuhmann, W.; Vogt, H.; Mokwa, W.

Koudelka-Hep, M.:
8th International Meeting on Chemical Sensors 2000. Abstract book
Amsterdam: Elsevier, 2000
S.174
International Meeting on Chemical Sensors (IMCS) <8, 2000, Basel>
Englisch
Konferenzbeitrag
Fraunhofer IMS ()
ultramicroelectrode-array; cyclic voltammetry; electrochemical impedance spectroscopy; scanning electron microscopy; thin-film transducer; Abtastung; array; Scheinwiderstand; Voltammetrie

Abstract
Miniaturised amperometric transducers have been realised on silicon wafers integrating a disk ultra-microelectrode array as working electrodes, a large counter electrode and a Ag/AgCl pseudo reference electrode in a three-electrode configuration. Cyclic voltammetry (CV), electrochemical impedance spectroscopy (EIS) and scanning electrochemical microscopy (SECM) have been evaluated as tools for rapid on-wafer determination of characteristic device parameters.

: http://publica.fraunhofer.de/dokumente/N-1573.html