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Influence of concentration of phosphorus dopant liquid and pulse distance on parameters of LCP selective emitters for silicon solar cells

: Hopman, S.; Fell, A.; Mesec, M.; Kluska, S.; Fleischmann, C.; Granek, F.; Glunz, S.W.

Volltext urn:nbn:de:0011-n-1564128 (99 KByte PDF)
MD5 Fingerprint: 9bd83c03faa8943e815730c9de376eeb
Erstellt am: 4.8.2012

European Commission:
25th European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC 2010. Proceedings : 5th World Conference on Photovoltaic Energy Conversion, 6-10 , September 2010, Valencia, Spain
München: WIP-Renewable Energies, 2010
ISBN: 3-936338-26-4
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <25, 2010, Valencia>
World Conference on Photovoltaic Energy Conversion <5, 2010, Valencia>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer ISE ()
Solarzellen - Entwicklung und Charakterisierung; Silicium-Photovoltaik; Dotierung und Diffusion; Kontaktierung und Strukturierung; Industrielle und neuartige Solarzellenstrukturen; Produktionsanlagen und Prozessentwicklung

In this paper newest results concerning n-type Laser Chemical Processing (LCP) doping for varying laser and liquid parameters will be presented with regard to sheet resistance, contact resistance and cell efficiency. In the first part of the paper the influence of dopant concentration reduction is investigated by using a TLM structure. Additionally the pulse energies are varied for different pulse distances to find optimum doping parameters. It is demonstrated that the dopant concentration of the dopant source can be strongly reduced and that for all tested pulse energies an optimal pulse distance exists. To verify if these results are suitable for solar cell production selected laser parameters were tested on a 30×60 mm² screen-printed solar cell structure. An efficiency improvement of 0.4 %abs is achieved for cells with LCP selective emitter in comparison to reference cells without selective emitter under the metal fingers.