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Impact of dielectric material and metal arrangement on thermal behaviour of interconnect systems

 
: Schulze, K.; Schulz, S.E.; Gessner, T.

Russel, S.W. ; California State University -CSU-; Materials Research Society -MRS-:
Advanced Metallization Conference, AMC 2006 : Proceedings of the conference held October 17 - 19, 2006, in San Diego, California, USA and September 26 - 27, 2006, at the University of Tokyo, Tokyo, Japan
Warrendale, Pa.: Materials Research Society, 2007
ISBN: 978-1-558-99947-3
S.445-451
Advanced Metallization Conference (AMC) <23, 2006, San Diego/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()
Fraunhofer IZM ()

: http://publica.fraunhofer.de/dokumente/N-154608.html