Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Spectroscopic ellipsometry study of thin diffusion barriers of TaN and Ta for Cu interconnects in integrated circuits
| Arwin, H.:
Papers presented at the 4th International Conference on Spectroscopic Ellipsometry, ICSE4 : Stockholm, Sweden, 11 - 15 June 2007
Weinheim: Wiley-VCH, 2008 (Physica status solidi. C, Current topics in solid state physics 5.2008, Nr.5) |
| International Conference on Spectroscopic Ellipsometry (ICSE) <4, 2007, Stockholm> |
|
| Englisch |
| Konferenzbeitrag |
| Fraunhofer ENAS ()
Fraunhofer IZM () |