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Spectroscopic ellipsometry study of thin diffusion barriers of TaN and Ta for Cu interconnects in integrated circuits

: Baum, M.; Letsch, H.; Shaporin, A.V.; Otto, T.; Gessner, T.

Arwin, H.:
Papers presented at the 4th International Conference on Spectroscopic Ellipsometry, ICSE4 : Stockholm, Sweden, 11 - 15 June 2007
Weinheim: Wiley-VCH, 2008 (Physica status solidi. C, Current topics in solid state physics 5.2008, Nr.5)
International Conference on Spectroscopic Ellipsometry (ICSE) <4, 2007, Stockholm>
Fraunhofer ENAS ()
Fraunhofer IZM ()