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Phosphane copper(I) complexes as CVD precursors
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2007
Journal Article
Titel
Phosphane copper(I) complexes as CVD precursors
Author(s)
Roth, N.
Jakob, A.
Waechtler, T.
Schulz, S.E.
Gessner, T.
Lang, H.
Zeitschrift
Surface and coatings technology
Konferenz
European Conference in Chemical Vapor Deposition (EUROCVD) 2007
DOI
10.1016/j.surfcoat.2007.05.004
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM