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Novel Copper(I) and Silver(I) Complexes as Precursors for Chemical Vapor Deposition and Spin-Coating of Copper and Silver
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2007
Conference Paper
Titel
Novel Copper(I) and Silver(I) Complexes as Precursors for Chemical Vapor Deposition and Spin-Coating of Copper and Silver
Author(s)
Frühauf, S.
Gessner, T.
Haase, T.
Jakob, A.
Kohse-Hoeinghaus, K.
Lang, H.
Schulz, S.E.
Wächtler, T.
Hauptwerk
Smart systems integration 2007
Konferenz
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2007
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM