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Thin Film Encapsulation of Microstructures using sacrificial CF-Polymer

 
: Reuter, D.; Bertz, A.; Werner, T.; Nowack, M.; Gessner, T.

Delapierre, G. ; Institute of Electrical and Electronics Engineers -IEEE-:
Transducers & Eurosensors 2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol.1 : June 10-14, 2007, Lyon, France
New York, NY: IEEE, 2007
ISBN: 1-4244-0841-5
ISBN: 978-1-4244-0841-2
ISBN: 1-4244-0842-3
S.343-346
European Conference on Solid-State Transducers (Eurosensors) <21, 2007, Lyon>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()
Fraunhofer IZM ()

: http://publica.fraunhofer.de/dokumente/N-154583.html