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Test-Structure based MEMS Characterization Technique
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2007
Conference Paper
Titel
Test-Structure based MEMS Characterization Technique
Author(s)
Shaporin, A.V.
Hanf M.
Forke, R.
Mehner, J.
Gessner, T.
Dötzel, W.
Hauptwerk
Smart systems integration 2007
Konferenz
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2007
Language
English
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Fraunhofer-Institut fĂĽr Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM