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Application of higher order derivatives method to parametric simulation of MEMS

 
: Kolchuzhin, V.; Mehner, J.; Gessner, T.; Doetzel, W.

:

Institute of Electrical and Electronics Engineers -IEEE-:
International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2007 : London, United Kingdom, 15 - 18 April 2007
Piscataway, NJ: IEEE Service Center, 2007
ISBN: 1-4244-1106-8
ISBN: 1-4244-1105-X
ISBN: 978-1-4244-1105-4
S.588-593
International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE) <8, 2007, London>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()
Fraunhofer IZM ()

: http://publica.fraunhofer.de/dokumente/N-154559.html