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Performance and reliability test of MEMS optical scanners
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2009
Book Article
Titel
Performance and reliability test of MEMS optical scanners
Author(s)
Kurth, Steffen
Kaufmann, C.
Hahn, R.
Specht, H.
Geßner, Thomas
Hauptwerk
Research on microreliability and nanoreliability. The micro materials center on display - on the occasion of Bernd Michel´s 60th Birthday
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS