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Quality assurance of micro-mechanical components

 
: Spath, D.; Elsner, J.

European Society for Precision Engineering and Nanotechnology -EUSPEN-:
3rd international EUSPEN conference. Proceedings. CD-ROM : And 4th general meeting; Eindhoven, The Netherlands, May 26th - 30th, 2002
Eindhoven, 2002
ISBN: 90-386-2883-8
S.403-406 (Vol.2)
European Society for Precision Engineering and Nanotechnology (International Conference) <3, 2002, Eindhoven>
Englisch
Konferenzbeitrag
Fraunhofer IAO ()

: http://publica.fraunhofer.de/dokumente/N-15402.html