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Dynamic characterization of thin aluminum nitride microstructures

: Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Sah, R.E.; Williams, O.A.; Kirste, L.; Leopold, S.; Pätz, D.; Cimalla, V.; Ambacher, O.; Lebedev, V.


Physica status solidi. C 8 (2011), Nr.2, S.479-481
ISSN: 1610-1634
ISSN: 1610-1642
ISSN: 1862-6351
International Symposium on Compound Semiconductors (ISCS) <37, 2010, Takamatsu>
Zeitschriftenaufsatz, Konferenzbeitrag
Fraunhofer IAF ()

In this work we report on the mechanical and material properties of membranes made of AlN and nanodiamond for the use in tunable micro-optics. AlN membranes with and without metal contacts have been studied in dynamic mode by laser Doppler vibrometry.