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Nanofabrication of reactive structure for low temperature bonding

: Lin, Y.; Bräuer, J.; Hofmann, L.; Baum, M.; Frömel, J.; Wiemer, M.; Esashi, M.; Gessner, T.


Institute of Electrical and Electronics Engineers -IEEE-:
3rd IEEE International Conference on Nano/Molecular Medicine and Engineering, NanoMed 2009. Proceedings : Tayih Landis Hotel, Tainan, Taiwan, 18-21 October, 2009
New York, NY: IEEE, 2010
ISBN: 978-1-4244-5528-7
International Conference on Nano/Molecular Medicine and Engineering (NanoMed) <3, 2009, Tainan>
Fraunhofer ENAS ()

Microsystems that are used for medical application mostly consist of temperature sensible components. Therefore the temperatures during the fabrication process must be limited. This paper deals with the fabrication of reactive nanostructures that have the capability to be used as local heat source and thus can be used for processes during the fabrication of temperature sensible systems. Hereby, heat is produced during a self propagating exothermal reaction of two different materials that are present in a multilayered system of horizontal or vertical arranged material films in nanoscale dimensions. In this paper the principle of the self propagating reaction of those reactive systems as well as their fabrication is shown.