Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Detailed study of copper oxide ALD on SiO2, TaN, and Ru
| AVS, the Science and Technology Society:
ALD 2009, 9th International Conference on Atomic Layer Deposition. CD-ROM : July 19 - 22, 2009, Monterey, CA
Monterey, Calif., 2009
1 S. |
| International Conference on Atomic Layer Deposition (ALD) <9, 2009, Monterey/Calif.> |
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| Englisch |
| Poster, Elektronische Publikation |
| Fraunhofer ENAS () |