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Investigation of the analysis parameters and background substraction for high-k materials with Atom Probe Tomography

 
: Mutas, S.; Klein, C.; Gerstl, S.S.

International Field Emission Society -IFES-:
IFES 2010, 52nd International Field Emission Symposium. Program and Abstract Book : 5-8 July 2010, Crowne plaza Coogee Beach, Sydney, Australia
Sydney, 2010
International Field Emission Symposium (IFES) <52, 2010, Sydney>
Englisch
Abstract
Fraunhofer CNT ()
atom probe; high-k materials

: http://publica.fraunhofer.de/dokumente/N-151495.html