English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Traps and trapping phenomena and their implications on electrical behavior of high-k capacitor stacks
Details
Full
Export
Statistics
Options
2011
Journal Article
Titel
Traps and trapping phenomena and their implications on electrical behavior of high-k capacitor stacks
Author(s)
Paskaleva, A.
Lemberger, M.
Atanassova, E.
Bauer, A.J.
Zeitschrift
Journal of vacuum science and technology B. Microelectronics and nanometer structures
Konferenz
Workshop on Dielectrics in Microelectronics (WoDiM) 2010
DOI
10.1116/1.3521501
Language
English
google-scholar
View Details
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB