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Design, operation and performance of a Fabry-Perot based MWIR micro spectrometer

Aufbau, Betrieb und Leistungsfähigkeit eines Fabry-Perot-basierten Mikro-Spektrometers für mittelwellige Infrarotstrahlung
 
: Ebermann, M.; Neumann, N.; Hiller, K.; Kurth, S.

AMA Fachverband für Sensorik e.V., Wunstorf:
OPTO 2009 & IRS2 2009. Proceedings : Nürnberg, Germany, 26 - 28 May 2009; part of SENSOR + TEST Conference 2009
Wunstorf: AMA Service, 2009
ISBN: 978-3-9810993-6-2
S.233-238
International Conference on Optical Technologies for Sensing and Measurement (OPTO) <9, 2009, Nürnberg>
International Conference on Infrared Sensors & Systems (IRS2) <11, 2009, Nürnberg>
Sensor + Test Conference <2009, Nürnberg>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()

Abstract
The tunable infrared detector is based on a bulk micromachined spectrally tunable Fabry-Perot interferometer with an air cavity, which is electrostatically tuned and combined with a pyroelectric infrared detector. This ensures low cost, small size and high optical performance. We demonstrated the flexible use of the tunable detector in gas analyzers and spectroscopic applications. According to the optical setup and the operation mode high signal-to-noise-ratios of up to 8000:1 and spectral resolution lambda/Delta lambda of up to 75 were achieved. Continuously sweeping the Fabry-Perot filter opens up new capabilities of a pyroelectric detector. This particular operation mode has principally the potential to accelerate the recordings of spectra remarkably. New application fields include medical diagnostics and detection of hazardous substances in industrial and security environments.

: http://publica.fraunhofer.de/dokumente/N-151435.html