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Numerical model of the plasmaline microwave plasma source

: Hunyar, C.; Rauchle, E.; Graf, M.; Alberts, L.; Kaiser, M.; Nauenburg, K.-D.


IEEE 35th International Conference on Plasma Science, ICOPS 2008. Online ressource
Piscataway: IEEE, 2008
ISBN: 978-1-424-41929-6
1 S.
IEEE International Conference on Plasma Science (ICOPS) <35, 2008, Karlsruhe>
Fraunhofer ICT ()

Summary form only given. Microwave generated reactive plasmas are due to their technical application and complexity high interest candidates for modeling by numerical simulation. Plasma models for some cases were developed by Stewart [1], Kousaka [2], Engemann [3] and others. This work focuses on the Plasmaline, a linearly extended microwave plasma source which is well suited to generate large-scale plasmas in the low-pressure range. Its use in industrial applications e.g. surface modification make it a fit target for simulation studies with the aim of facilitating the design of large-scale plasma devices and processes. For this intent a numerical model for Argon plasma was developed, solving the coupled system of Maxwell equations, continuity equations for electrons and metastable states and the electron heat equation. The solutions are self-consistently calculated with the COMSOL Multiphysics finite element simulation software. Our model can successfully predict the transient and spatial development of the source's plasma parameters (electron temperature, electron density) and field distribution for axial symmetric geometries. The simulations are in good qualitative agreement with experimental results. A quantitative verification will be implemented with a recently acquired plasma probe and will together with simulations of 3D models be pushing our model further towards the goal of an easy usable development tool for large-scale plasma sources.