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Hier finden Sie wissenschaftliche Publikationen aus den FraunhoferInstituten. Numerical model of the plasmaline microwave plasma source
 IEEE 35th International Conference on Plasma Science, ICOPS 2008. Online ressource Piscataway: IEEE, 2008 ISBN: 9781424419296 1 S. 
 IEEE International Conference on Plasma Science (ICOPS) <35, 2008, Karlsruhe> 

 Englisch 
 Abstract 
 Fraunhofer ICT () 
Abstract
Summary form only given. Microwave generated reactive plasmas are due to their technical application and complexity high interest candidates for modeling by numerical simulation. Plasma models for some cases were developed by Stewart [1], Kousaka [2], Engemann [3] and others. This work focuses on the Plasmaline, a linearly extended microwave plasma source which is well suited to generate largescale plasmas in the lowpressure range. Its use in industrial applications e.g. surface modification make it a fit target for simulation studies with the aim of facilitating the design of largescale plasma devices and processes. For this intent a numerical model for Argon plasma was developed, solving the coupled system of Maxwell equations, continuity equations for electrons and metastable states and the electron heat equation. The solutions are selfconsistently calculated with the COMSOL Multiphysics finite element simulation software. Our model can successfully predict the transient and spatial development of the source's plasma parameters (electron temperature, electron density) and field distribution for axial symmetric geometries. The simulations are in good qualitative agreement with experimental results. A quantitative verification will be implemented with a recently acquired plasma probe and will together with simulations of 3D models be pushing our model further towards the goal of an easy usable development tool for largescale plasma sources.