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Title
Beschichtungsanlage mit Aktivierungselement sowie Verfahren zu dessen Herstellung
Date Issued
2009
Author(s)
Schäfer, L.
Harig, T.
Höfer, M.
Laukart, A.
Patent No
102009001285
Abstract
(A1) Die Erfindung betrifft eine Beschichtungsanlage, enthaltend zumindest einen evakuierbaren Rezipienten (10), welcher zur Aufnahme eines Substrates (30) vorgesehen ist, eine Gaszufuhreinrichtung (15, 16, 20, 21), mittels welcher zumindest ein gasfoermiger Prekursor in den Rezipienten (10) einleitbar ist und zumindest ein beheizbares Aktivierungselement (24), welches ein Material enthaelt, welches zumindest zwei verschiedene chemische Elemente enthaelt, welche ausgewaehlt sind aus Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W, Re, Os, Ir oder Pt. Weiterhin betrifft die Erfindung Verfahren zur Herstellung eines solchen Aktivierungselementes und Verfahren zu dessen Verwendung.
DE 102009015545 A1 UPAB: 20100920 NOVELTY - The coating plant comprises an evacuatable recipient (10) for the reception of a substrate (30), a gas supply device (15, 16) by which a gaseous precursor is introduced into the recipient, and a heatable activation element (24). The material of the activation element consists of two different chemical elements. The material of the activation element consists of mixed crystal phase, intermediate phase and/or pure element phase and is formed by a wire, which has a diameter of 0.2-0.7 mm. The wire has a core and an edge zone. DETAILED DESCRIPTION - The coating plant comprises an evacuatable recipient (10) for the reception of a substrate (30), a gas supply device (15, 16) by which a gaseous precursor is introduced into the recipient, and a heatable activation element (24). The material of the activation element consists of two different chemical elements. The material of the activation element consists of mixed crystal phase, intermediate phase and/or pure element phase and is formed by a wire, which has a diameter of 0.2-0.7 mm. The wire has a core and an edge zone, which consists of a component of material of the core and a further element. A mixing zone is formed between the core and edge zone, where the material of the edge zone continuously passes into the material of the core within the mixing zone. INDEPENDENT CLAIMS are included for: (1) a method for the production of activation element; and (2) a method for the deposition of a coating. USE - Coating plant useful for the deposition of carbon-, silicon- and/or germanium-containing coating on a substrate. ADVANTAGE - The coating plant ensures simple and efficient deposition of carbon-, silicon- and/or germanium-containing coating on a substrate with high quality.
Language
de
Patenprio
DE 102009001285 A1: 20090302