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Beschichtungsanlage und -verfahren

Coating plant comprises an evacuatable recipient for the reception of a substrate, a gas supply device by which a gaseous precursor is introduced in the recipient, a reservoir, and a heatable activation element
 
: Schäfer, L.; Harig, T.; Höfer, M.; Laukart, A.; Armgardt, M.

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DE 102009023471 A: 20090602
DE 102009023471 A: 20090602
C23C0016
Deutsch
Patent, Elektronische Publikation
Fraunhofer IST ()

Abstract
(A1) Die Erfindung betrifft eine Beschichtungsanlage, enthaltend zumindest einen evakuierbaren Rezipienten, welcher zur Aufnahme eines Substrates vorgesehen ist, zumindest eine Gaszufuhreinrichtung, mittels welcher zumindest ein gasfoermiger Prekursor in den Rezipienten einleitbar ist, und zumindest ein beheizbares Aktivierungselement, welchem mittels zumindest zweier Kontaktelemente ein elektrischer Strom zufuehrbar ist, wobei zumindest eines der Kontaktelemente dazu eingerichtet ist, das Aktivierungselement an wechselnden Kontaktstellen zu kontaktieren. Weiterhin betrifft die Erfindung ein korrespondierendes Beschichtungsverfahren.

 

DE 102009023471 A1 UPAB: 20101216 NOVELTY - The coating plant comprises an evacuatable recipient (10) for the reception of a substrate (30), a gas supply device (20, 21, 22) by which a gaseous precursor is introduced in the recipient, a reservoir, and a heatable activation element (40), which supplies an electric current by two contact elements (43). One of the contact elements is directed to contact the activation element on changing contact positions. The contact element consists of contact pins, which are arranged along the longitudinal stretching of the activation element and movable against the activation element. DETAILED DESCRIPTION - The coating plant comprises an evacuatable recipient (10) for the reception of a substrate (30), a gas supply device (20, 21, 22) by which a gaseous precursor is introduced in the recipient, a reservoir, and a heatable activation element (40), which supplies an electric current by two contact elements (43). One of the contact elements is directed to contact the activation element on changing contact positions. The contact element consists of contact pins, which are arranged along the longitudinal stretching of the activation element and movable against the activation element. The activation element consists of a wire. The contact element consists of a roller that is equipped to contact with the activation element. The wire is diverted at the roller. A predeterminable quantity of the wire is contained in the reservoir. The wire is guidable through effect zone in endless manner. The contact elements are arranged along the longitudinal stretching of the activation elements, which are mountable with a predetermined electric potential difference. The activation element is positionable by an electrically insulated mechanical mounting device. An INDEPENDENT CLAIM is included for a method for the production of a coating of a substrate. USE - Coating plant useful for coating a substrate. ADVANTAGE - The coating plant increases the process stability, simplifies the process control and ensures the coating of the substrate with good quality and with less consumption of energy.

: http://publica.fraunhofer.de/dokumente/N-148683.html