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Beschichtungsanlage und Beschichtungsverfahren

Coating plant comprises an evacuatable recipient for the reception of a substrate, a gas supply device by which a gaseous precursor is introduced in the recipient, and a cylindrical-shaped heatable protection element
 
: Schäfer, L.; Harig, T.; Höfer, M.; Laukart, A.; Armgardt, M.

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Frontpage ()

DE 102009023472 A: 20090602
DE 102009023472 A: 20090602
C23C0016
Deutsch
Patent, Elektronische Publikation
Fraunhofer IST ()

Abstract
(A1) Die Erfindung betrifft eine Beschichtungsanlage, enthaltend zumindest einen evakuierbaren Rezipienten, welcher zur Aufnahme eines Substrates vorgesehen ist, zumindest eine Gaszufuhreinrichtung, mittels welcher zumindest ein gasfoermiger Prekursor in den Rezipienten einleitbar ist, und zumindest eine Aktivierungseinrichtung, welche zumindest ein beheizbares Aktivierungselement enthaelt, dessen Ende an einer Befestigungsstelle an einem Halteelement befestigt ist, wobei ein Abschirmelement vorhanden ist, mit welchem zumindest die Befestigungsstelle zumindest teilweise vor der Einwirkung des gasfoermigen Prekursors schuetzbar ist, wobei das Abschirmelement im Wesentlichen zylinderfoermig ausgebildet ist und der Querschnitt des Abschirmelementes polygonal oder rund ist und an der dem Halteelement abgewandten Seite des Abschirmelementes ein Verschlusselement angeordnet ist, welches zumindest eine Austrittsoeffnung aufweist.

 

DE 102009023472 A1 UPAB: 20101216 NOVELTY - The coating plant comprises an evacuatable recipient (10) for the reception of a substrate (30), a gas supply device (20, 21, 22) by which a gaseous precursor is introduced in the recipient, a cylindrical-shaped heatable protection element and an activation device (40), which consists of a heatable activation element (41), whose end is mounted on a mounting position to a holding element. The mounting position is partially assessable before introducing the gaseous precursor by the protection element. The cross-section of the protection element is polygonal or round. DETAILED DESCRIPTION - The coating plant comprises an evacuatable recipient (10) for the reception of a substrate (30), a gas supply device (20, 21, 22) by which a gaseous precursor is introduced in the recipient, a cylindrical-shaped heatable protection element and an activation device (40), which consists of a heatable activation element (41), whose end is mounted on a mounting position to a holding element. The mounting position is partially assessable before introducing the gaseous precursor by the protection element. The cross-section of the protection element is polygonal or round and a closure element is arranged on the side of the protection element turned away the holding element. The closure element comprises a discharge opening. The protection element has a separation wall, which separates the interior volume of the protection element in a first part volume and a second part volume. The protection element has a changeable cross-section along its longitudinal axis. A part of the protection element is separatably connected with the holding element. The protection element has a gas discharge opening, which is connected with a vacuum pump, and a gas supply opening, which supplies reactive gas and/or inert gas. The protection element is electrically insulated by the holding element and/or the activation element and comprises ribs on its interior side. The protection element is equipped with a sorption material, which consists of zeolite, metal foam and/or titanium film. An INDEPENDENT CLAIM is included for a method for producing a coating of a substrate. USE - Coating plant useful for coating a substrate. ADVANTAGE - The coating plant increases the process stability, simplifies the process control and ensures the coating of the substrate with good quality and with less consumption of energy.

: http://publica.fraunhofer.de/dokumente/N-148682.html