English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Assessing various analytical techniques with different lateral resolution by investigating spin-coated inorganic contamination on Si surfaces
Details
Full
Export
Statistics
Options
2009
Journal Article
Titel
Assessing various analytical techniques with different lateral resolution by investigating spin-coated inorganic contamination on Si surfaces
Author(s)
Grasso, S.
Cazzini, E.
Bersani, M.
Lazzeri, P.
Gennaro, S.
Kolbe, M.
Müller, M.
Kregsamer, P.
Posch, F.
Zeitschrift
ECS transactions
DOI
10.1149/1.3204421
Language
English
google-scholar
View Details
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB